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A novel method for the fabrication of high-aspect ratio C-MEMS structures File

Wang, CL , Jia, GY , Taherabadi, LH , Madou, Mark

Article Issue Date2005-04 View315
C-MEMS for the manufacture of 3D microbatteries File

Wang, CL , Taherabadi, L , Jia, GY , Madou, Mark , Yeh, YT , Dunn, B

Article Issue Date2004 View121
Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media File

Park, BY , Taherabadi, L , Wang, CL , Zoval, J , Madou, Mark

Article Issue Date2005 View191
From MEMS to NEMS with carbon File

Wang, CL , Madou, Mark

Article Issue Date2005-04 View132
Polymer actuator valves toward controlled drug delivery application File

Xu, H , Wang, C , Wang, CL , Zoval, J , Madou, Mark

Article Issue Date2006-05 View110
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