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Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu File

Han, Seung-Min , Nandi, Dip K. , Joo, Yong-Hwan , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Nabeya, Shunichi , Harada, Ryosuke , Kim, Soo-Hyun

Article Issue Date2020-05 View5

Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen File

Park, Na-Yeon , Kim, Minsu , Kim, Youn-Hye , Ramesh, Rahul , Nandi, Dip K. , Tsugawa, Tomohiro , Shigetomi, Toshiyuki , Suzuki, Kazuharu , Harada, Ryosuke , Kim, Miso , et al

Article Issue Date2022-02 View27

Atomic layer deposition of low-resistivity and high-density tungsten nitride thin films using B2H6, WF6, and NH3 File

Kim, Soo-Hyun , Kim, JK , Kwak, N , Sohn, H , Kim, J , Jung, SH , Hong, MR , Lee, SH , Collins, J

Article Issue Date2006-01 View16

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects File

Kotsugi, Yohei , Han, Seung-Min , Kim, Youn-Hye , Cheon, Taehoon , Nandi, Dip K. , Ramesh, Rahul , Yu, Neung-Kyung , Son, Kirak , Tsugawa, Tomohiro , Ohtake, Shigeyuki , et al

Article Issue Date2021-07 View6

Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant File

Hong, Tae Eun , Mun, Ki-Yeung , Choi, Sang-Kyung , Park, Ji-Yoon , Kim, Soo-Hyun , Cheon, Taehoon , Kim, Woo Kyoung , Lim, Byoung-Yong , Kim, Sunjung

Article Issue Date2012-07 View6

Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant File

Jung, Jae-Hun , Lee, Seung-Joon , Lee, Hyun-Jung , Lee, Min Young , Cheon, Taehoon , Bae, So Ik , Saito, Masayuki , Suzuki, Kazuharu , Nabeya, Shunichi , Lee, Jeongyeop , et al

Article Issue Date2015-11 View6

Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects File

Cheon, Taehoon , Choi, Sang-Hyeok , Kim, Soo-Hyun , Kang, Dae-Hwan

Article Issue Date2011-03 View10

Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization File

Yeo, Seungmin , Choi, Sang-Hyeok , Park, Ji-Yoon , Kim, Soo-Hyun , Cheon, Taehoon , Lim, Byoung-Yong , Kim, Sunjung

Article Issue Date2013-11 View7

Atomic layer deposition of Ti-doped ZnO films with enhanced electron mobility File

Lee, Do-Joong , Kim, Ki-Ju , Kim, Soo-Hyun , Kwon, Jang-Yeon , Xu, Jimmy , Kim, Ki-Bum

Article Issue Date2013-06 View12

Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory File

Lee, Minyoung , Hidayat, Romel , Nandi, Dip K. , Kim, Tae Hyun , Kim, Yewon , Kim, Seongyoon , Lee, Won -Jun , Kim, Soo-Hyun

Article Issue Date2021-10 View8

Atomic layer deposition of tungsten sulfide using a new metal-organic precursor and H2S: thin film catalyst for water splitting File

Kim, Deok-Hyun , Ramesh, Rahul , Nandi, Dip K. , Bae, Jong-Seong , Kim, Soo-Hyun

Article Issue Date2021-02 View5

Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier File

Kim, Jun Beom , Nandi, Dip K. , Kim, Tae Hyun , Jang, Yujin , Bae, Jong-Seong , Hong, Tae Eun , Kim, Soo-Hyun

Article Issue Date2019-09 View9

Atomic Layer Deposition Route to Scalable, Electronic-Grade van der Waals Te Thin Films File

Kim, Changhwan , Hur, Namwook , Yang, Jiho , Oh, Saeyoung , Yeo, Jeongin , Jeong, Hu Young , Shong, Bonggeun , Suh, Joonki

Article Issue Date2023-08 View16

Atomic Layer Deposition-A Versatile Toolbox for Designing/Engineering Electrodes for Advanced Supercapacitors File

Ansari, Mohd Zahid , Hussain, Iftikhar , Mohapatra, Debananda , Ansari, Sajid Ali , Rahighi, Reza , Nandi, Dip K. , Song, Wooseok , Kim, Soo-Hyun

Article Issue Date2024-01 View14

Atomic layer etching of BeO using BCl3/Ar for the interface passivation layer of III-V MOS devices File

Min, K. S. , Kang, S. H. , Kim, J. K. , Yum, J. H. , Jhon, Y. I. , Hudnall, Todd W. , Bielawski, C. W. , Banerjee, S. K. , Bersuker, G. , Jhon, M. S. , et al

Article Issue Date2014-02 View6

Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves File

Chen, Xiaoshu , Park, Hyeong-Ryeol , Pelton, Matthew , Piao, Xianji , Lindquist, Nathan C. , Im, Hyungsoon , Kim, Yun Jung , Ahn, Jae Sung , Ahn, Kwang Jun , Park, Namkyoo , et al

Article Issue Date2013-09 View8

Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches File

Nguyen, Chi Thang , Gu, Bonwook , Cheon, Taehoon , Park, Jeongwoo , Khan, Mohammad Rizwan , Kim, Soo-Hyun , Shong, Bonggeun , Lee, Han-Bo-Ram

Article Issue Date2021-06 View5

Atomic Layers of Ruthenium Oxide Coupled with Mo2TiC2Tx MXene for Exceptionally High Catalytic Activity Toward Water Oxidation File

Tiwari, Jitendra N. , Umer, Muhammad , Bhaskaran, Gokul , Umer, Sohaib , Lee, Geunsik , Kim, Min Gyu , Lee, Han-Koo , Kumar, Krishan , Vilian, A.T. Ezhil , Huh, Yun Suk , et al

Article Issue Date2023-12 View11

Atomic resolution imaging and spectroscopy of graphene using the TEAM 0.5 File

Lee, Zonghoon , Dato, Albert , Jeon, Ki-Joon , Erni, Rolf , Richardson, Thomas J. , Frenklach, Michael , Radmilovic, Velimir

Conference Paper Issue Date2009-07-27 View6

Atomic Resolution Imaging of Rotated Bilayer Graphene Sheets Using a Low kV Aberration-corrected Transmission Electron Microscope File File

Ryu, Gyeong Hee , Park, Hyo Ju , Kim, Na Yeon , Lee, Zonghoon

Article Issue Date2012-12 View6

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