BROWSE

Related Researcher

Author

Kwon, Soon-Yong
Frontier, Innovative Nanomaterials & Devices (FIND) Lab
Research Interests
  • Semiconductor Epitaxy, thin film technology & surface/ interface Science

ITEM VIEW & DOWNLOAD

Effect of NH3 flow rate on m-plane GaN growth on m-plane SiC by metalorganic chemical vapor deposition

Cited 11 times inthomson ciCited 12 times inthomson ci
Title
Effect of NH3 flow rate on m-plane GaN growth on m-plane SiC by metalorganic chemical vapor deposition
Author
Sun, QianYerino, Christopher D.Zhang, YuCho, Yong SukKwon, Soon-YongKong, Bo HyunCho, Hyung KounLee, In-HwanHan, Jung
Keywords
A1. Morphology; A1. Planar defects; A1. X-ray diffraction; A3. Metalorganic chemical vapor deposition; B2. Nonpolar; B2. Semiconducting gallium nitride
Issue Date
200907
Publisher
ELSEVIER SCIENCE BV
Citation
JOURNAL OF CRYSTAL GROWTH, v.311, no.15, pp.3824 - 3829
Abstract
This paper reports a study of the effect of NH3 flow rate on m-plane GaN growth on m-plane SiC with an AlN buffer layer. It is found that a reduced NH3 flow rate during m-plane GaN growth can greatly improve the recovery of in situ optical reflectance and the surface morphology, and narrow down the on-axis (1 0 1̄ 0) X-ray rocking curve (XRC) measured along the in-plane a-axis. The surface striation along the in-plane a-axis, a result of GaN island coalescence along the in-plane c-axis, strongly depends on the NH3 flow rate, an observation consistent with our recent study of kinetic Wulff plots. The pronounced broadening of the (1 0 1̄ 0) XRC measured along the c-axis is attributed to the limited lateral coherence length of GaN domains along the c-axis, due to the presence of a high density of basal-plane stacking faults, most of which are formed at the GaN/AlN interface, according to transmission electron microscopy.
URI
Go to Link
DOI
http://dx.doi.org/10.1016/j.jcrysgro.2009.06.035
ISSN
0022-0248
Appears in Collections:
MSE_Journal Papers

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU