High-Performance Monolithic 3D Integrated Red μLEDoS Display for AR/VR

Abstract

The monolithic 3D (M3D) integration of Si CMOS integrated circuits (IC) and μLEDs is essential for high-resolution AR/VR displays. In this work, we successfully demonstrated a red μLEDoS display of 1700 PPI and a 640×480 resolution based on the M3D process. The phosphide red μLED devices exhibited excellent color performance as unit pixels. Notably, with high pixel yield achieved through a low-temperature process below 300° C and a metal mesh structure mitigating IR drop issues, we successfully implemented high-quality imaging driven by real-time HDMI inputs using 8-bit grayscale. This study plays an essential role in advancing M3D μLEDoS next-generation display.