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- Kim, Soo-Hyun
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Growth of High-Quality InN Thin Films by Plasma-Enhanced ALD Using a Novel Indium Precursor and NH3 Plasma
- Author(s)
- Kim, Yejun, 김상복, Kim, Soo-Hyun
- Issued Date
- 2025-12-11
- Citation
- The 14th International Conference on Advanced Materials and Devices (ICAMD 2025)
- Publisher
- Applied Physics Division, Korean Physical Society (KPS)
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