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- Kim, Soo-Hyun
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | The 14th International Conference on Advanced Materials and Devices (ICAMD 2025) | - |
| dc.contributor.author | Seo, Dongbeom | - |
| dc.contributor.author | Kim, Sang Bok | - |
| dc.contributor.author | Kim, Soo-Hyun | - |
| dc.date.accessioned | 2025-12-29T17:33:19Z | - |
| dc.date.available | 2025-12-29T17:33:19Z | - |
| dc.date.created | 2025-12-27 | - |
| dc.date.issued | 2025-12-11 | - |
| dc.identifier.bibliographicCitation | The 14th International Conference on Advanced Materials and Devices (ICAMD 2025) | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/89438 | - |
| dc.publisher | Applied Physics Division, Korean Physical Society (KPS) | - |
| dc.title | Highly conductive ALD-WCx thin films using a novel fluorine-free W precursor for Cu & Ru interconnects | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2025-12-08 | - |
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