Hybrid deburring of micro-machined titanium alloy channels with O2 plasma large pulsed electron beam (LPEB) irradiation

Abstract

Micro-manufacturing processes are essential for technological advances in various industries, such as aerospace, automotive, nuclear, biomedicine, and semiconductors. Especially, micro-machining offers advantages in material selection, dimensional accuracy, and complex geometries. However, burr formation in micro-machined titanium alloy components poses significant challenges for medical implant applications, compromising surface quality and biocompatibility. This study presents a hybrid deburring approach combining abrasive process with O2 plasma large pulsed electron beam (LPEB) irradiation for Ti-6Al-4V micro-channels. Three deburring methods were compared: abrasive, LPEB, and hybrid processing. The hybrid approach achieved superior performance with minimal burr height (16.25 mu m) and error area (49.97 mu m2), representing 78.26 % and 59.34 % reductions compared to abrasive deburring alone. Surface roughness values of 1.25 mu m (top) and 1.12 mu m (bottom) were obtained, alongside enhanced hydrophilicity through oxygen vacancy formation and chemical modification. These results demonstrate that LPEB-based hybrid deburring effectively addresses critical requirements for medical implant manufacturing, simultaneously improving geometric accuracy, surface quality, and biocompatibility.