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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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Research on Silicon Oxynitride Thin Films Deposited by PECVD Processes with Low-GWP Gas
- Author(s)
- Shin, Tae Joo, Jang, Woo Cheol
- Issued Date
- 2024-11-20
- Citation
- PSA-24: 9th International Symposium on Practical Surface Analysis
- Publisher
- The Surface Analysis Society of Japan & Korean Society of Surface Analysis
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