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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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| DC Field | Value | Language |
|---|---|---|
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 부산 파라다이스호텔 | - |
| dc.citation.title | PSA-24: 9th International Symposium on Practical Surface Analysis | - |
| dc.contributor.author | Shin, Tae Joo | - |
| dc.contributor.author | Jang, Woo Cheol | - |
| dc.date.accessioned | 2025-01-07T10:35:06Z | - |
| dc.date.available | 2025-01-07T10:35:06Z | - |
| dc.date.created | 2025-01-06 | - |
| dc.date.issued | 2024-11-20 | - |
| dc.identifier.bibliographicCitation | PSA-24: 9th International Symposium on Practical Surface Analysis | - |
| dc.identifier.uri | https://scholarworks.unist.ac.kr/handle/201301/85812 | - |
| dc.language | 영어 | - |
| dc.publisher | The Surface Analysis Society of Japan & Korean Society of Surface Analysis | - |
| dc.title | Research on Silicon Oxynitride Thin Films Deposited by PECVD Processes with Low-GWP Gas | - |
| dc.type | Conference Paper | - |
| dc.date.conferenceDate | 2024-11-17 | - |
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