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Lee, Seungchul
iSystems Design Lab
Research Interests
  • Intelligent design for products and manufacturing systems

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Genetic Algorithm for Job Scheduling with Maintenance Consideration in Semiconductor Manufacturing Process

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Title
Genetic Algorithm for Job Scheduling with Maintenance Consideration in Semiconductor Manufacturing Process
Author
Lee, SeungchulNi, Jun
Keywords
Chamber condition; Cluster tool; Decision making process; Degradation condition; Job scheduling; Maintenance activity; Optimization method; Scheduling problem; Semiconductor manufacturing process; Semiconductor manufacturing systems; Sequencing problems; Simulation-based optimizations; Wafer yields
Issue Date
2012
Publisher
HINDAWI PUBLISHING CORPORATION
Citation
MATHEMATICAL PROBLEMS IN ENGINEERING, v.2012, no., pp.875641 -
Abstract
This paper presents wafer sequencing problems considering perceived chamber conditions and maintenance activities in a single cluster tool through the simulation-based optimization method. We develop optimization methods which would lead to the best wafer release policy in the chamber tool to maximize the overall yield of the wafers in semiconductor manufacturing system. Since chamber degradation will jeopardize wafer yields, chamber maintenance is taken into account for the wafer sequence decision-making process. Furthermore, genetic algorithm is modified for solving the scheduling problems in this paper. As results, it has been shown that job scheduling has to be managed based on the chamber degradation condition and maintenance activities to maximize overall wafer yield.
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DOI
10.1155/2012/875641
ISSN
1024-123X
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DHE_Journal Papers
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