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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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열전도도식 가스센서를 위한 공중부유형 1D 단일 나노와이어형 히터의 메쉬 형태 백본 기반 웨이퍼 레벨 공정 기법
- Author(s)
- Cho, Wootaek, Kim, Taejung, Kwak, Jong-Hyun, Yoo, Jihyeon, Shin, Heungjoo
- Issued Date
- 2024-05-17
- Citation
- 2024년도 대한기계학회 마이크로/나노부문 춘계학술대회
- Publisher
- 대한기계학회
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