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초미세 틈 구조 기반 고효율 광학 능동소자 제조방법
- Author(s)
- 김대식, Das Bamadev, 지명수, 이덕형, MAHSA HADDADI MOGHADDAM
- Application Date
- 2022-10-13
- Registration Date
- 2024-01-24
- Application No.
- 10-2022-0131189
- Publication No.
- 10-2630706
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