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- Kim, Byungjo
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Multiscale simulation on plasma-surface interaction: mitigation of leakage current at high-k metal oxide interface
- Author(s)
- Kim, Byungjo, Kim, Muyoung, Yoo, Suyoung, Nam, Sangki
- Issued Date
- 2021-10-05
- Citation
- The 74th Annual Gaseous Electronics Conference
- Publisher
- American Physical Society
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