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- Kim, Byungjo
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Plasma chamber design method combined with plasma deep learning model and optimization algorithm
- Author(s)
- Ko, JungMin, Bae, Jinkyu, Kim, Byungjo, Lee, Hyunjae, Jo, Younghyun, Nam, Sangki
- Issued Date
- 2022-10-06
- Citation
- 75th Annual Gaseous Electronics Conference
- Publisher
- American Physical Society
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