20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Abstract
We show a novel microfluidic fabrication technique to shape liquid containing various materials into desired, complex, hybrid-scale networked patterns by directed evaporation and pinning of the liquid [1]. The patterns of liquid can work as templates for processing materials in liquid-phase at micro-/nanoscales. We demonstrate that multiple heterogeneous material patterns, including 3D structures, are fabricated on a flexible substrate in a simple, low-cost, scalable, and controllable manner. We also demonstrate that the one-step liquid patterning process produces ~300 nm wide and ~100 µm long nanowire networks over a large area, which is not easily achievable with conventional bottom-up processes.
Publisher
Electron Devices Society (EDS),Hahn-Schickard,IEEE