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- Kim, Jingook
- Integrated Circuit and Electromagnetic Compatibility Lab.
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A Low-Voltage Microwave Plasma Ionizer without the ESD Risk due to a High Voltage Source
- Author(s)
- Bae, Byoungjin, Park, Junsik, Kim, Jingook
- Issued Date
- 2019-09-17
- Citation
- 2019 EOS/ESD Symposium
- Abstract
- A low-voltage microwave plasma ionizer is proposed. The proposed ionizer eliminates the ESD risk on a target sensitive electronic device due to strong electric field induced by a high voltage source in the ionizer itself and has a good performance to neutralize a charged device.
- Publisher
- 2019 EOS/ESD Symposium
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