Metal-insulator-silicon-insulator-metal waveguides compatible with standard CMOS technology

Abstract

Metal-insulator-silicon-insulator-metal (MISIM) waveguides are proposed and investigated theoretically. They are hybrid plasmonic waveguides, and light is highly confined to the insulator between the metal and silicon. As compared to previous ones, they are advantageous since they may be realized in a simple way by using current standard CMOS technology and their insulator is easily replaceable without affecting the metal and silicon. First, their structure and fabrication process are explained, both of which are compatible with standard CMOS technology. Then, the characteristics of the single MISIM waveguide whose insulator has its original or an adjusted refractive index are analyzed. The analysis demonstrates that its characteristics are comparable to those of previous hybrid plasmonic waveguides and that they are very effectively tuned by changing the refractive index of the insulator. Finally, the characteristics of the two coupled MISIM waveguides are analyzed. Through the analysis, it is obtained how close or far apart they are for efficient power transfer or low crosstalk. MISIM-waveguide-based devices may play an important role in connecting Si-based photonic and electronic circuits.