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신흥주

Shin, Heungjoo
Micro/Nano Integrated Systems Lab.
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Heater embedded metal oxide nanowire gas sensor in a suspended architecture

Alternative Title
히터가 내장된 공중부유형 금속산화물 나노와이어 기반 가스센서
Author(s)
Kim, TaejungLee, SeungwookKim, BeomsangCho, WootaekShin, Heungjoo
Issued Date
2020-08-20
URI
https://scholarworks.unist.ac.kr/handle/201301/78300
Citation
제22회 한국 MEMS 학술대회
Publisher
마이크로나노시스템학회

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