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Shin, Hyung-Joon
Nanoscale Materials Science Lab (NMSL)
Research Interests
  • Scanning tunneling microscopy, surface science, interface science, nanomaterials

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Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask

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Title
Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask
Author
Shin, Hyung-JoonChoi, JHYang, HJPark, YDKuk, YKang, CJ
Keywords
Nanodot arrays; Silicon nitrade
Issue Date
2005-09
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.87, no.11, pp.113114-1 - 113114-3
Abstract
We grew well-ordered arrays of ferroelectric Pb (Zr0.2 Ti0.8) O3 (PZT) nanodots on a SrRu O3 SrTi O3 substrate by pulsed laser deposition. A silicon nitride shadow mask with ordered holes was used for patterning of the PZT arrays. Each dot has a height of ∼15 nm and a diameter of ∼120 nm with a similar dome shape over a large area. The ferroelectric properties of individual PZT dots were investigated by piezoresponse force microscopy. A single dot could be polarized individually and the polarized state remained unrelaxed to ∼20 min.
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DOI
10.1063/1.208818
ISSN
0003-6951
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MSE_Journal Papers
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