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최경진

Choi, Kyoung Jin
Energy Conversion Materials Lab.
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dc.citation.endPage 1153 -
dc.citation.number 11 -
dc.citation.startPage 1152 -
dc.citation.title ELECTRONICS LETTERS -
dc.citation.volume 34 -
dc.contributor.author Lee, JL -
dc.contributor.author Choi, Kyoung Jin -
dc.date.accessioned 2023-12-22T12:36:14Z -
dc.date.available 2023-12-22T12:36:14Z -
dc.date.created 2014-10-22 -
dc.date.issued 1998-05 -
dc.description.abstract A newly developed sulphur diffusion method for fabricating GaAs FETs is demonstrated. Sulphur atoms adsorbed at the surface of GaAs by the (NH(4))(2)S(x) treatment were diffused into GaAs during rapid thermal annealing. Transconductance as high as 190mS/mm was obtained for MESFETs with 1.0 mu m gate length, fabricated on the lavers diffused by this technique. This diffusion technique was found to be suitable for GaAs device fabrication. -
dc.identifier.bibliographicCitation ELECTRONICS LETTERS, v.34, no.11, pp.1152 - 1153 -
dc.identifier.doi 10.1049/el:19980819 -
dc.identifier.issn 0013-5194 -
dc.identifier.scopusid 2-s2.0-0032075717 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/7716 -
dc.identifier.url http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=0032075717 -
dc.identifier.wosid 000074370900081 -
dc.language 영어 -
dc.publisher INST ENGINEERING TECHNOLOGY-IET -
dc.title GaAs MESFET fabrication using (NH4)2Sx solution sulphur diffusion technique -
dc.type Article -
dc.description.journalRegisteredClass scopus -

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