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- Kim, Jingook
- Integrated Circuit and Electromagnetic Compatibility Lab.
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A Low-Voltage Microwave Plasma Ionizer without Reduced Ionizing Performance Due to Particle Fuzzballs
- Author(s)
- Bae, Byungjin, Yoon, Hyun, Hwang, Ho-Jong, Kim, Jingook
- Issued Date
- 2021-09-27
- Citation
- Annual Electrical Overstress/Electrostatic Discharge Symposium
- Abstract
- A low-voltage microwave plasma ionizer without reduced ionizer performance due to particle fuzzballs is proposed. After operation for two weeks without maintenance in a cleanroom and a laboratory, the particles and ionizing performance of the plasma ionizer are measured and compared with a conventional corona ionizer.
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
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