BROWSE

Related Researcher

Author's Photo

Jo, Wook
Sustainable Functional Ceramics Lab
Research Interests
  • Lead-free piezoceramics, ultra - low temperature sintering, ferroelectrics, relaxor ferroelectrics, 2D materials, magnetoelectric materials, multiferroics

ITEM VIEW & DOWNLOAD

Low temperature deposition of crystalline silicon on glass by hot wire chemical vapor deposition

Cited 4 times inthomson ciCited 11 times inthomson ci
Title
Low temperature deposition of crystalline silicon on glass by hot wire chemical vapor deposition
Author
Chung, Yung-BinPark, Hyung-KiLee, Dong-KwonJo, WookSong, Jean-HoLee, Sang-HoonHwang, Nong-Moon
Issue Date
2011-07
Publisher
ELSEVIER SCIENCE BV
Citation
JOURNAL OF CRYSTAL GROWTH, v.327, no.1, pp.57 - 62
Abstract
Although the deposition of crystalline silicon on a glass substrate has been pursued using hot wire chemical vapor deposition or plasma enhanced chemical vapor deposition for applications in flat panel displays and solar cells, the process has been only partly successful because of the inevitable formation of an amorphous incubation layer on a glass substrate. Currently, the crystalline silicon films are prepared by depositing an amorphous silicon film on a glass substrate and then crystallizing it by excimer laser annealing (ELA), metal induced crystallization or rapid thermal annealing (RTA). Here we report a new process, which can remove the amorphous incubation layer and thereby deposit crystalline silicon directly on glass using HCl. The intrinsic crystalline silicon film has a conductivity of 3.7 x 10(-5) Scm(-1) and the n-type doped crystalline silicon film has the Hall mobility of 15.8 cm(2)V(-1)s(-1), whose values are comparable to those prepared by ELA and RTA, respectively.
URI
https://scholarworks.unist.ac.kr/handle/201301/7551
URL
https://www.sciencedirect.com/science/article/pii/S0022024811004520?via%3Dihub
DOI
10.1016/j.jcrysgro.2011.05.004
ISSN
0022-0248
Appears in Collections:
MSE_Journal Papers
Files in This Item:
There are no files associated with this item.

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qrcode

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU