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Suh, Joonki
Semiconductor Nanotechnology Lab.
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차세대 상변화 메모리소재용 Ge2Sb2Te5 박막 두께 표준물질 개발 및 보급

Alternative Title
Development and distribution of thickness controlled standard Ge2Sb2Te5 thin films for next-generation phase change memory
Author(s)
Suh, Joonki
Issued Date
2022-10-28
URI
https://scholarworks.unist.ac.kr/handle/201301/75243
Citation
2022 한국세라믹학회 추계학술대회
Publisher
한국세라믹학회

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