JOURNAL OF APPLIED PHYSICS, v.93, no.11, pp.9024 - 9029
Abstract
The microstructural, optical and magnetic properties of Mn-implanted p-type GaN were investigated. Dilute magnetic semiconductor was achieved by implanting Mn ions into p-type GaN and subsequently annealing. The Ga-Mn magnetic phases contributing to the ferromagnetic property were produced after annealing Mn-implanted p-type GaN below 800°C.