BROWSE

Related Researcher

Author's Photo

Jang, Jaesung
Sensors & Aerosols Lab
Research Interests
  • Bio-MEMS
  • Bioaerosols
  • Sensor
  • Aerosol Cleaning
  • Fluid Mechanics at microscales

ITEM VIEW & DOWNLOAD

Effective heights and tangential momentum accommodation coefficients of gaseous slip flows in deep reactive ion etching rectangular microchannels

DC Field Value Language
dc.contributor.author Jang, Jaesung ko
dc.contributor.author Wereley, ST ko
dc.date.available 2014-10-17T00:13:03Z -
dc.date.created 2014-10-16 ko
dc.date.issued 2006-03 -
dc.identifier.citation JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.16, no.3, pp.493 - 504 ko
dc.identifier.issn 0960-1317 ko
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/7321 -
dc.identifier.uri http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=33344473738 ko
dc.description.abstract The behavior of a rarefied, compressible flow in long, constant cross section channels provides an opportunity to study complex gas dynamics in a simple geometry that allows analytical solutions. The problem of a rarefied, compressible flow in near unity aspect ratio rectangular cross section channels has been all but ignored despite it being a common flow geometry. We present analytical expressions for the mass flow rate in long, straight and uniform rectangular cross section microchannels in the slip flow regime. Using these analytical expressions, we extract the tangential momentum accommodation coefficient (TMAC) as well as the effective channel dimensions to account for a slight curvature of one of the walls of the rectangle. These expressions are effective in near unity aspect ratio rectangular microchannels made by deep reactive ion etching. The dependence of the flow behavior on the channel height to width aspect ratio is discussed as is the effect of the slight deviation from a rectangular cross section. The obtained TMAC results are consistent with values found by previous researchers using similar materials. Finally, a method of determining TMACs in channels consisting of non-homogenous materials or processing methods is presented. ko
dc.description.statementofresponsibility close -
dc.language ENG ko
dc.publisher IOP PUBLISHING LTD ko
dc.subject GAS-FLOW ko
dc.subject MICRODEVICES ko
dc.subject CHANNELS ko
dc.title Effective heights and tangential momentum accommodation coefficients of gaseous slip flows in deep reactive ion etching rectangular microchannels ko
dc.type ARTICLE ko
dc.identifier.scopusid 2-s2.0-33344473738 ko
dc.identifier.wosid 000237073000004 ko
dc.type.rims ART ko
dc.description.wostc 18 *
dc.description.scopustc 20 *
dc.date.tcdate 2015-05-06 *
dc.date.scptcdate 2014-10-16 *
dc.identifier.doi 10.1088/0960-1317/16/3/004 ko
Appears in Collections:
MEN_Journal Papers

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show simple item record

qrcode

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU