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- Ki, Hyungson
- Laser Processing and Artificial Intelligence Lab.
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DLC 필름 제조방법
- Alternative Title
- A DLC FILM FABRICATION METHOD
- Application Date
- 2014-04-11
- Registration Date
- 2016-03-28
- Application No.
- 10-2014-0043734
- Publication No.
- 10-1608473
- Abstract
- 본 발명은, 증착대상물에 형성된 DLC 필름에 있어서, DLC성분의 프로파일 함수 CDLC 은, x 가 증가함에 따라서 그 함수값이 같거나 증가하는 증가함수이며, SUS 성분의 프로파일 함수 CSUS는 1-CDLC 인 DLC 필름을 제공한다.
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