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- Shin, Tae Joo
- Synchrotron Radiation Research Lab.
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CD-SAXS: Synchrotron based small-angle X-Ray scattering technique for the photolithography pattern
- Author(s)
- Yoon, Young Je, Shin, Tae Joo
- Issued Date
- 2023-11-23
- Citation
- 2023 한국표면분석학회 종합학술대회
- Publisher
- (사)한국표면분석학회
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