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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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실리콘 식각을 통한 공중부유형 탄소나노메쉬의 제조
- Author(s)
- Kwak, Jong-Hyun, Cho, Wootaek, Shin, Heungjoo
- Issued Date
- 2023-03-22
- Citation
- 제25회 한국 MEMS 학술대회
- Publisher
- 마이크로나노시스템학회
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