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Song, Myoung Hoon
Organic Photonics & Optoelectronics Lab.
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Enhanced biaxial stretchability of wrinkled SiO2 thin films for stretchable encapsulation

Author(s)
Kim, Na-HyangHwang, Gyeong-SeokKim, HangeulKim, Si-HoonWoo, Jeong-HyunSong, Myoung HoonKim, Ju-Young
Issued Date
2022-01
DOI
10.1016/j.scriptamat.2021.114280
URI
https://scholarworks.unist.ac.kr/handle/201301/54799
Fulltext
https://www.sciencedirect.com/science/article/pii/S1359646221005601?via%3Dihub
Citation
SCRIPTA MATERIALIA, v.207, pp.114280
Abstract
Enhanced biaxial stretchability of highly impermeable SiO2 encapsulation thin film with wrinkle struc-tures is demonstrated. Submicron-thick SiO2 films are grown on single-crystalline Si wafers to endure local strain on wrinkled film, and their high elastic deformation limit stabilizes wrinkle structure. SiO2 films are transferred onto prestrained elastomer, and two types of wrinkle structures are formed by re-moval of the prestrain: aligned wrinkles by uniaxial prestrain and random wrinkles by equibiaxial pre-strain. The stretchability of the large area film is correlated with the unwrinkling of individual wrinkles, and a mechanics model is suggested to predict stretchability with parameters of wrinkle morphology as well as elastic properties of the encapsulation film and the elastomer substrate.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
ISSN
1359-6462
Keyword (Author)
BucklingBiaxial stretchabilityThin filmsTension testSilica glass
Keyword
SILICA GLASSDEFORMATIONPERMEATIONSUBSTRATEDIOXIDE

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