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Device for rapid sample insertion and extraction in thermal chemical vapor deposition tube furnace

Author(s)
McBride, WSRuoff, RS
Issued Date
2004-10
DOI
10.1063/1.1790564
URI
https://scholarworks.unist.ac.kr/handle/201301/54481
Fulltext
https://aip.scitation.org/doi/10.1063/1.1790564
Citation
REVIEW OF SCIENTIFIC INSTRUMENTS, v.75, no.10, pp.3351 - 3353
Abstract
In this article, a simple and inexpensive device to allow the rapid insertion and withdrawal of samples from a tube furnace is described. The device operates in an atmosphere that is separate from ambient. This device shortens sample insertion and extraction times, which allows the study of the short time kinetics of chemical vapor deposition processes, and may allow for the growth of structures that could not be achieved using the conventional sample insertion and extraction procedure. The use of magnets to provide actuation through the walls of a quartz tube furnace is entirely general to any procedure using a tube furnace.
Publisher
AMER INST PHYSICS
ISSN
0034-6748

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