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RuoffRodney Scott

Ruoff, Rodney S.
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The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2

Author(s)
Pirkle, A.Chan, J.Venugopal, A.Hinojos, D.Magnuson, C. W.McDonnell, S.Colombo, L.Vogel, E. M.Ruoff, R. S.Wallace, R. M.
Issued Date
2011-09
DOI
10.1063/1.3643444
URI
https://scholarworks.unist.ac.kr/handle/201301/54285
Fulltext
https://aip.scitation.org/doi/10.1063/1.3643444
Citation
APPLIED PHYSICS LETTERS, v.99, no.12, pp.122108
Abstract
The effects of residues introduced during the transfer of chemical vapor deposited graphene from a Cu substrate to an insulating (SiO2) substrate on the physical and electrical of the transferred graphene are studied. X-ray photoelectron spectroscopy and atomic force microscopy show that this residue can be substantially reduced by annealing in vacuum. The impact of the removal of poly(methyl methacrylate) residue on the electrical properties of graphene field effect devices is demonstrated, including a nearly 2 x increase in average mobility from 1400 to 2700 cm(2)/Vs. The electrical results are compared with graphene doping measurements by Raman spectroscopy.
Publisher
AMER INST PHYSICS
ISSN
0003-6951
Keyword
SUBSTRATEFILMSDEVICES

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