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- Jang, Ji-Hyun
- Structures & Sustainable Energy Lab.
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Cyclopropyl Group Containing Photoacid Generator for ArF Lithography
- Author(s)
- Jang, Ji-Hyun
- Issued Date
- 2001-01-01
- Citation
- KAIST-Kyoto University 2001 Chemistry Symposium
- Publisher
- KAIST-Kyoto University
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