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Yoon, Tae-Sik
Nano Semiconductor Research Lab.
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Controlling dislocation positions in Silicon Germanium (SiGe) buffer layers by local oxidation

Author(s)
Yoon, Tae-Sik
Issued Date
2009-05-18
URI
https://scholarworks.unist.ac.kr/handle/201301/50689
Citation
6th International Conference on Silicon Epitaxy and Heterostructures
Publisher
The Electrochemical Society

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