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Yoon, Tae-Sik
Nano Semiconductor Research Lab.
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Nanocrystal floating gate memory with solution-processed indium-zinc-tin-oxide channel and colloidal silver nanocrystals

Author(s)
Hu, QuanliHa, Sang-HyubLee, Hyun HoYoon, Tae-Sik
Issued Date
2011-12
DOI
10.1088/0268-1242/26/12/125021
URI
https://scholarworks.unist.ac.kr/handle/201301/50264
Citation
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.26, no.12
Abstract
A nanocrystal (NC) floating gate memory with solution-processed indium-zinc-tin-oxide (IZTO) channel and silver (Ag) NCs embedded in thin gate dielectric layer (SiO2(30 nm)/Al2O3(3 nm)) was fabricated. Both the IZTO channel and colloidal Ag NC layers were prepared by spin-coating and subsequent annealing, and dip-coating process, respectively. A threshold voltage shift up to similar to 0.9 V, corresponding to the electron density of 6.5 x 10(11) cm(-2), at gate pulsing <= 10 V was achieved by the charging of high density NCs. These results present the successful non-volatile memory characteristics of an oxide-semiconductor transistor fabricated through solution processes.
Publisher
IOP PUBLISHING LTD
ISSN
0268-1242
Keyword
NANOPARTICLESTEMPERATURESINGLELAYERTFTSSEMICONDUCTORS

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