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저주파(60Hz) 마그네트론 스퍼터링으로 제작한 ITO 박막의 기체 분압비에 따른 전기적, 광학적 특성

Author(s)
Park, Lee Soon
Issued Date
2005-04-21
URI
https://scholarworks.unist.ac.kr/handle/201301/44187
Citation
한국물리학회 2005년 학술대회
Publisher
한국물리학회

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