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반응성 DC pulse MF 마그네트론 스퍼터링을 이용한 Flexible 기판의 기체 차단막 특성

Author(s)
Park, Lee Soon
Issued Date
2011-11-03
URI
https://scholarworks.unist.ac.kr/handle/201301/43547
Citation
2011 추계 공업화학회
Publisher
한국공업화학회

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