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- Kim, Ju-Young
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Sub-100 nm 두께 SiNx 박막의 인장 물성
- Author(s)
- Kim, Ju-Young, Kim, Si Hoon, Woo, Junghyun
- Issued Date
- 2015-10-28
- Citation
- 2015 대한금속재료학회 추계학술대회
- Publisher
- 대한금속재료학회
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