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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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Mixed-scale PMMA channel networks fabricated by nanoimprint using a monolithic carbon mold
- Alternative Title
- 모놀리씩 카본 몰드 기반 나노임프린트 공정으로 가공된 혼합 스케일 PMMA 채널 네트워크
- Issued Date
- 2016-04-09
- Citation
- 제18회 한국MEMS학술대회
- Publisher
- 한국마이크로나노시스템학회
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