dc.citation.conferencePlace |
US |
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dc.citation.title |
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
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dc.contributor.author |
Chung, SE |
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dc.contributor.author |
Lee, SA |
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dc.contributor.author |
Kim, Jiyun |
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dc.contributor.author |
Kwon, S |
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dc.date.accessioned |
2023-12-20T04:08:17Z |
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dc.date.available |
2023-12-20T04:08:17Z |
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dc.date.created |
2016-08-24 |
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dc.date.issued |
2009-06 |
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dc.description.abstract |
We demonstrate optofluidic packaging of silicon microchips using image processing-based optofluidic maskless lithography (IP-OFML). Optofluidic maskless lithography (OFML) is a dynamic photopolymerization technique for free-floating microstructures within a fluidic channel using a MEMS spatial light modulator. OFML via computer vision-aided image processing enables individual polymer packaging of each microdevice for protection. Furthermore, our technology is applicable to phosphor coating of light emitting diodes (LEDs). |
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dc.identifier.bibliographicCitation |
The 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
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dc.identifier.doi |
10.1109/SENSOR.2009.5285518 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/41269 |
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dc.identifier.url |
http://ieeexplore.ieee.org/document/5285518/?reload=true&arnumber=5285518 |
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dc.language |
영어 |
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dc.publisher |
TRANSDUCERS |
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dc.title |
Optofluidic packaging of silicon microchips for applications in light emitting devices |
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dc.type |
Conference Paper |
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dc.date.conferenceDate |
2009-06-21 |
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