Continuous Fabrication of Film Type Acoustic Metamaterials for Acoustic Attenuation

Abstract

We report the development of ¯lm type acoustic metamaterials by utilizing micro scale resonators. In detail, we show the establishment of fabrication techniques for micro resonator by using photolithography and replication processes. Throughout the research, we have veri¯ed geometrical, material properties of metamaterials and target sound properties for better optimizing acoustic attenuation. We observed micro-structured resonator has acoustic attenuation at speci¯c frequency range and absorbing resonant frequency can be adjust as change the resonator's geometrical values. Also, we developed mass production system by overcoming traditional wafer scale fabrication system by using visually tolerable tiling method and roll to roll imprint system. Ultimately, we hope to apply these acoustic metamaterials to various applications such as national defense area and medical field.