고효율 초정밀 생체모사 건식접착 구조 제작 공정

Abstract

In here, we present a simple, reliable and scalable method with detail processes for fabricating bio-inspired dry adhesive mushroom-shaped microstructures with controlled tip dimensions. In this method, conventional photolithography processes are used with SU-8 photoresist and lift-off resist. In this process, lift-off resist become sacrificial layer and selectively etched, controlling the tip geometry of bio-inspired mushroom-shaped micropillars following LOR etchant after SU-8 patterning.This method uses popularly used commercial materials thus the microstructures are simply fabricated with cost-effective manner. The fabricated micropillar arrays performed various adhesion properties with the various tip shapes.