Low-power-consumption gas sensor based on suspended carbon nano-heater

Abstract

We developed a low-power-consumption gas sensor built on a suspended carbon nano heater. This gas sensor was fabricated using only batch fabrication processes such as carbon-MEMS, atomic layer deposition and hydrothermal method. Without any complex and expensive nanofabrication technologies, ZnO nanowires were grown selectively on a suspended carbon-nanowire-based heater. Because of the small size and good thermal insulation of the nanowire-type heater, the metal oxide nanowire-based sensor could detect various gases such as NO2, CO, SO2 and H2 with small power consumption (~ 1.2 mW). In this presentation, we will introduce the detailed fabrication processes, thermal characterization of the nano-heater, and sensor performances.