19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, pp.1285 - 1287
Abstract
Rapid thermal annealing (RTA) process enabling significant enhancement of electrical conductivity (up to 2.3 times greater than currently reported conductivity values) of 1D glassy carbon nanostructures fabricated using carbon-MEMS was developed. After the RTA process, the carbon/oxygen and G-/D-band ratios that are strongly correlated to the electrical conductivity were changed depending on the pyrolysis temperature. The architecture of a suspended carbon nanowire also plays strong role on RTA-based conductivity enhancement by up to 14 % compared to carbon nanowire built on the substrate. In addition, electrochemical reactivity can be enhanced via RTA enabling better redox current collection.
Publisher
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017