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- Grzybowski, Bartosz A.
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Direct printing of 3D and curvilinear micrometer-sized architectures into solid substrates with sub-micrometer resolution
- Author(s)
- Campbell, Christopher J., Smoukov, Stoyan K., Bishop, Kyle J. M., Baker, Eric, Grzybowski, Bartosz A.
- Issued Date
- 2006-08
- Citation
- ADVANCED MATERIALS, v.18, no.15, pp.2004 - +
- Abstract
- Micropatterned hydrogel stamps carrying etchant solutions are used to microstructure glass and silicon with complex 3D architectures (see figure and inside cover). A two-way reaction-diffusion mechanism initiated from the stamp enables direct printing of entire microdevices (left to right: two-level microfluidic channels, curvilinear microlenses in glass, nanostructured silicon) into solid substrates with resolution down to 300 nm.
- Publisher
- WILEY-V C H VERLAG GMBH
- ISSN
- 0935-9648
- Keyword
- REACTION-DIFFUSION, THIN-FILMS, GLASS, MICROFABRICATION, LITHOGRAPHY, FABRICATION, DEVICES, GELS
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