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- Jang, Ji-Hyun
- Structures & Sustainable Energy Lab.
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Highly transparent poly(glycidyl methacrylate-: Co -acryloisobutyl POSS) for 100 μm-thick submicron patterns with an aspect ratio over 100
- Author(s)
- Kim, Kwanghyun, Yu, Sunyoung, Kim, Sung-Wook, Kim, Taegeon, Kim, Sang-Min, Kang, Se-Young, Han, Seung Min, Jang, Ji-Hyun
- Issued Date
- 2017-07
- Citation
- CHEMICAL COMMUNICATIONS, v.53, no.58, pp.8172 - 8175
- Abstract
- This is the first report on the fabrication of defect-free submicron structures with more than 100 μm thickness and an aspect ratio over 100. Highly transparent poly(glycidyl methacrylate-co-acryloisobutyl POSS) (PGP) was synthesized via radical polymerization. The mechanical properties of the PGP submicron structure displayed a Young's modulus of 6.09 GPa and a hardness of 0.16 GPa, 4.2 and 8 times, respectively, than those of SU8 nanopatterns. These enhancements enable the utilization of ultrathick 2D-/3D-submicron structures as an ideal platform for microelectromechanical systems, big data storage systems, energy devices, etc.
- Publisher
- ROYAL SOC CHEMISTRY
- ISSN
- 1359-7345
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