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장지현

Jang, Ji-Hyun
Structures & Sustainable Energy Lab.
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Highly transparent poly(glycidyl methacrylate-: Co -acryloisobutyl POSS) for 100 μm-thick submicron patterns with an aspect ratio over 100

Author(s)
Kim, KwanghyunYu, SunyoungKim, Sung-WookKim, TaegeonKim, Sang-MinKang, Se-YoungHan, Seung MinJang, Ji-Hyun
Issued Date
2017-07
DOI
10.1039/c7cc02937c
URI
https://scholarworks.unist.ac.kr/handle/201301/22384
Fulltext
http://pubs.rsc.org/en/Content/ArticleLanding/2017/CC/C7CC02937C#!divAbstract
Citation
CHEMICAL COMMUNICATIONS, v.53, no.58, pp.8172 - 8175
Abstract
This is the first report on the fabrication of defect-free submicron structures with more than 100 μm thickness and an aspect ratio over 100. Highly transparent poly(glycidyl methacrylate-co-acryloisobutyl POSS) (PGP) was synthesized via radical polymerization. The mechanical properties of the PGP submicron structure displayed a Young's modulus of 6.09 GPa and a hardness of 0.16 GPa, 4.2 and 8 times, respectively, than those of SU8 nanopatterns. These enhancements enable the utilization of ultrathick 2D-/3D-submicron structures as an ideal platform for microelectromechanical systems, big data storage systems, energy devices, etc.
Publisher
ROYAL SOC CHEMISTRY
ISSN
1359-7345
Keyword
POLYHEDRAL OLIGOMERIC SILSESQUIOXANEINTERFERENCE LITHOGRAPHYPHOTONIC CRYSTALSNANOPARTICLESNANOPATTERNSFILMS

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