Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates
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- Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates
- Chen, Jianyi; Liu, Bo Liu; Liu, Yanpeng; Tang, Wei; Nai, Chang Tai; Li, Linjun; Zheng, Jian; Gao, Libo; Zheng, Yi; Shin, Hyeon Suk; Jeong, Hu Young; Loh, Kian Ping
- Issue Date
- WILEY-V C H VERLAG GMBH
- ADVANCED MATERIALS, v.27, no.42, pp.6722 - 6727
- High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V-1 s(-1) and a photoresponsivity of approximate to 1100 mA W-1, which is comparable to that of exfoliated flakes. inheim
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