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Park, Lee Soon
School of Materials Science and Engineering
Research Interests
  • Flexible OLED new materials, process and fabrication
  • Touch Screen Panel(TSP) new materials and process new materials and process
  • Nano-materials synthesis and application (Ag nano-wire and metal mesh electrode)

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Transparent Conductive ITO/Ag/ITO Multilayer Films Prepared by Low Temperature Process and Physical Properties

Cited 7 times inthomson ciCited 5 times inthomson ci
Title
Transparent Conductive ITO/Ag/ITO Multilayer Films Prepared by Low Temperature Process and Physical Properties
Author
Kim, Tae HoonChoi, Bo HyePark, Jae SoungLee, Sang MunLee, Yun SuPark, Lee Soon
Keywords
ROOM-TEMPERATURE; Ag thin interlayer; flexible OLED; flexible substrate; indium tin oxide (ITO); transparent conductive oxide (TCO)
Issue Date
2010
Publisher
TAYLOR & FRANCIS LTD
Citation
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.520, no., pp.485 - 490
Abstract
Transparent conductive ITO/Ag/ITO multilayer thin films were successfully deposited on polyethylene terephthalate (PET) substrates by RF sputtering of ITO layer and DC sputtering of Ag layer at room temperature. Electrical and optical properties of ITO/Ag/ITO multilayer films were strongly dependent on the thickness of Ag thin interlayer. The ITO (50 nm)/Ag (17 nm)/ITO (50 nm) multilayer films deposited on PET substrates exhibited lowest sheet resistance (6.7 Omega/square) and highest transmittance (83.2% at 550 nm). Especially, the sheet resistance of ITO/Ag/ITO multilayer films was superior to those of the commercial ITO (150 nm) films deposited on rigid glass substrates at high temperature. The ITO/Ag/ITO multilayer films coated PET substrate could be a good candidate for application to a transparent conductive oxide (TCO) electrode material for large size flexible OLED devices
URI
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DOI
10.1080/15421400903584465
ISSN
1542-1406
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MSE_Journal Papers
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