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High Quality Transparent Conductive ITO/Ag/ITO Multilayer Films Deposited on Glass Substrate at Room Temperature
- Author(s)
- Kim, Tae Hoon, Kim, Chang Hwan, Kim, Suk Kyung, Lee, Yun Su, Park, Lee Soon
- Issued Date
- 2010-10
- Citation
- MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.532, pp.528 - 534
- Abstract
- In this study, we report the electrical and optical properties of ITO/Ag/ITO multilayer films deposited on glass substrate by in-line RF sputtering of ITO and DC sputtering of Ag at room temperature. The physical properties of the ITO/Ag/ITO multilayer films changed significantly with the thickness of Ag interlayer. The ITO (43 nm)/Ag (16.1 nm)/ITO (43 nm) multilayer films exhibited both good transmittance (79.4% at 550 nm) and low sheet resistance (8.9 Omega/sq.) due to the combined effects of top ITO layer acting as anti-reflection layer and Ag thin interlayer acting as conductive layer. Furthermore, the maximum figure of merit value of the ITO/Ag/ITO multilayer films was obtained at a Ag thickness of 16.1 nm
- Publisher
- TAYLOR & FRANCIS LTD
- ISSN
- 1542-1406
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