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Park, Lee Soon
School of Materials Science and Engineering
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  • Flexible OLED new materials, process and fabrication
  • Touch Screen Panel(TSP) new materials and process new materials and process
  • Nano-materials synthesis and application (Ag nano-wire and metal mesh electrode)

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Characteristics of ITO thin films for organic light emitting diode by using a low-frequency magnetron sputtering method

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Title
Characteristics of ITO thin films for organic light emitting diode by using a low-frequency magnetron sputtering method
Author
Kim, Myung ChanSohn, Sang HoPark, Duck KyuJung, Sang KoounKim, Eun LyoungLee, Yun SuHur, YoungjunePark, Lee SoonChoi, Kyu-Han
Keywords
indium tin oxide; low-frequency magnetron sputtering method; optical transmittance; roughness; sheet resistance; thin film
Issue Date
2007-09
Publisher
TAYLOR & FRANCIS LTD
Citation
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.470, no., pp.251 - 257
Abstract
In this study, we have tried the growth of indium tin oxide (ITO) thin films by using low-frequency magnetron sputtering method (LFMSM). Characteristics of ITO thin films deposited on polyethersulfone (PES) and polyetyleneterephthalate (PET) substrates arc, investigated. Experiments were carried out as a function of deposition time. With increasing the deposition time of the ITO thin films on PES substrate, the sheet resistance is decreased. ITO thin films on polymer substrates were amorphous structure
URI
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DOI
10.1080/15421400701495831
ISSN
1542-1406
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MSE_Journal Papers
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