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- Lee, Zonghoon
- Atomic-Scale Electron Microscopy Lab.
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Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition
- Author(s)
- Ahn, Chisung, Lee, Jinhwan, Kim, Hyeong-U, Bark, Hunyoung, Jeon, Minhwan, Ryu, Gyeong Hee, Lee, Zonghoon, Yeom, Geun Young, Kim, Kwangsu, Jung, Jaehyuck, Kim, Youngseok, Lee, Changgu, Kim, Taesung
- Issued Date
- 2015-09
- Citation
- ADVANCED MATERIALS, v.27, no.35, pp.5223 - 5229
- Abstract
- By plasma‐enhanced chemical vapor deposition, a molybdenum disulfide (MoS2) thin film is synthesized directly on a wafer‐scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm2 V−1 s−1. Also, humidity is successfully detected with MoS2‐based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.
- Publisher
- WILEY-V C H VERLAG GMBH
- ISSN
- 0935-9648
- Keyword (Author)
- flexible sensor, low temperature, molybdenum disulfide (MoS2), plasma-enhanced chemical vapor deposition (PECVD), plastic substrate
- Keyword
- MOS2 ATOMIC LAYERS, MONOLAYER MOS2, GRAPHENE, TRANSISTORS, NANOSHEETS, GROWTH, SILICON, SULFUR, SIO2
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