Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition
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- Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition
- Ahn, Chisung; Lee, Jinhwan; Kim, Hyeong-U; Bark, Hunyoung; Jeon, Minhwan; Ryu, Gyeong Hee; Lee, Zonghoon; Yeom, Geun Young; Kim, Kwangsu; Jung, Jaehyuck; Kim, Youngseok; Lee, Changgu; Kim, Taesung
- Issue Date
- WILEY-V C H VERLAG GMBH
- ADVANCED MATERIALS, v.27, no.35, pp.5223 - 5229
- By plasma‐enhanced chemical vapor deposition, a molybdenum disulfide (MoS2) thin film is synthesized directly on a wafer‐scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm2 V−1 s−1. Also, humidity is successfully detected with MoS2‐based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.
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